Applied Materials Centura

Models in this family

1. 

   Centura

   The Applied Materials Centura is a semiconductor processing platform used for chemical vapor deposition (CVD) and etching.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Ultima+ HDP	—	2002	—	Equipment inventory listing[1]
   3 C/H, DxZ	—	2000	—	Equipment inventory listing[2]
   SIGEN 4CH	—	—	—	Equipment inventory listing[3]
   Centura CVD (Chemical Vapor Deposition)	—	2000	Listed with product details including 8" Ultima+ HDP, 8" 3 C/H DxZ, and 12" SIGEN 4CH.	Equipment inventory listing[1]
   Centura Etcher	—	2003	Listed as an etcher variant with 12" wafer size and EMAX CT Plus.	Equipment inventory listing[4]
   Centura CVD Ultima+ HDP	—	2002	8-inch CVD configuration; described as Ultima+ HDP with 2002 vintage.	Equipment inventory listing[1]
   Centura CVD DxZ	—	2000	8-inch CVD configuration; described as 3 C/H DxZ with 2000 vintage.	Equipment inventory listing[2]
   Centura Etcher EMAX CT Plus	—	2003	12-inch etch configuration; described as 3 C/H EMAX CT Plus with 2003 vintage.	Equipment inventory listing[4]
   Centura CVD SIGEN 4CH	—	—	12-inch CVD configuration; described as SIGEN 4CH.	Equipment inventory listing[3]

2. 

   Centura 1 P 2
3. Centura 4.0 DPN

   The Applied Materials Centura 4.0 DPN is a Decoupled Plasma Nitride deposition system designed for 12-inch wafers and configured as a Gate Stack tool.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Centura 4.0 DPN Plus Chamber	—	—	—	fabsurplus.com[5]

4. Centura 5300 Omega HDP Dry

   Applied Materials Centura 5300 Omega HDP Dry Etcher is an 8-inch dry etcher with 2 channels for SiO2 D/E CH-A/B.

5. 

   Centura AP AdvantEdge G 5 Dry

   Applied Materials Centura AP AdvantEdge G 5 is a dry etcher with three chambers and listed process gases for Chambers A, B, and D.

6. 

   Centura AP Enabler Dielectric

   Applied Materials Centura AP Enabler Dielectric Etcher is a 300 mm dielectric etcher with GEM/CIM JGJ online connection and a 3 carrier stage interface.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Centura AP Enabler E5	—	2010	Dielectric Etcher with 4 process chambers; Fab Interface type: Centura Etch 5.3 FAC; Frame 5.3 Fi Rev 002	fabsurplus.com[6]

7. Centura DPHe
8. 

   Centura DPS+

   The Applied Materials Centura DPS+ is an etch system for 200 mm (8 inch) wafers with multiple chamber configurations.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Centura DPS	—	—	Identified in the sources as a Centura DPS Etcher; one source notes chambers only, no loadport, with 9 chambers listed as 4 incomplete but okay condition and 5 parts.	Equipment inventory listing[7]

9. 

   Centura DPS+ Poly Silicon

   The Applied Materials Centura DPS+ Poly Silicon Etcher is a 6-inch wafer etching system with multiple DPS Plus chambers.

10. 

    Centura Dry

    Applied Materials Centura Dry Etcher is a 3-chamber Ultima dry etcher with 1 cool down and 1 orienter/degas, using BCL3, C2, SF6, He, and Ar gases.

11. 

    Centura DxZ

    Applied Materials Centura DxZ is a CVD (Chemical Vapor Deposition) equipment line.

12. Centura eMax Nitride

    The Applied Materials Centura eMax Nitride is an etch system configured for 8-inch wafers with two eMAX chambers and an orienter/degas module.

13. 

    Centura eMXP+

    The Applied Materials Centura eMXP+ is an etch tool for 8-inch wafers, configured for oxide and nitride spacer processes, with a 208 VAC electrical supply and software version E4.8_26.

14. Centura Enabler Oxide

    Applied Materials Centura Enabler Oxide Etcher is an oxide etcher from Applied Materials.

    Cited variants

    Designation	Generation	Vintage	Changes	Source
    Centura Enabler (2008 Vintage)	—	2008	Listed as 2008 vintage	Equipment inventory listing[8]
    Centura Enabler (Server OS Type 2008 Vintage)	—	2008	Includes Server OS Type	Equipment inventory listing[9]

15. 

    Centura HP

    Applied Materials Centura HP is a PVD (Physical Vapor Deposition) system for 8-inch wafers.

16. Centura HTF
17. 

    Centura I DPS Poly

    Applied Materials Centura I DPS Poly is an etcher with two DPS Poly chambers and 8-inch wafer size support.

18. Centura I P 1

    The Applied Materials Centura I P 1 is an oxide etcher for 6-inch wafers.

19. Centura I P 2 DPS

    Applied Materials Centura I P 2 DPS is a Decoupled Plasma Source deposition system for 8-inch wafers.

    Cited variants

    Designation	Generation	Vintage	Changes	Source
    Centura I P 2 DPS, 8" R1 Metal 2CH ASP+ 2CH 2002 Vintage	—	2002	The source states this example is a 2002 vintage unit and includes the descriptors 8" R1 Metal 2CH ASP+ 2CH.	Equipment inventory listing[10]
    Centura I P 2 DPS, 8" R1 Metal 2CH ASP+ 2CH 2000 Vintage	—	2000	The source states this example is a 2000 vintage unit and includes the descriptors 8" R1 Metal 2CH ASP+ 2CH.	Equipment inventory listing[11]

20. 

    Centura I Phase II Oxide

    The Applied Materials Centura I Phase II Oxide Etcher (also known as the 5200 Centura I Phase II) is an oxide etcher configured for 6-inch wafers with an upgrade path to 200 mm wafers.

21. 

    Centura II

    The Applied Materials Centura II is a dry etch tool used in semiconductor processing, configured with DPS+Metal process modules and supporting 6-inch wafers. The tool is from circa 2001.

    Cited variants

    Designation	Generation	Vintage	Changes	Source
    Centura II	—	—	Listed with configuration option DPS + Metal.	waferpedia.com[12]

22. Centura II eMax

    Applied Materials Centura II eMax is an etcher with 8-inch wafer size and 4x eMax chambers.

23. Centura RTP
24. 

    Centura Super E

    The Applied Materials Centura Super E is an 8-inch etch system with three chambers and wide body loadlocks.

25. 

    Centura Tectra
26. 

    Centura Ultima+ HDP

    The Applied Materials Centura Ultima+ HDP is a chemical vapor deposition system for 6-inch wafers, equipped with an ENI AM200 RF generator.

27. Centura WxZ

Sources