Applied Materials
Centura eMXP+
The Applied Materials Centura eMXP+ is an etch tool for 8-inch wafers. The Centura eMXP+ is configured for oxide and a nitride spacer process. The Centura eMXP+ operates on 208 VAC at 50/60 Hz with a full load current of 240 A.[1][2]
What it is
How it works
General reference — not yet source-verifiedAn etch tool removes selected material from a wafer by exposing the surface to a controlled plasma or reactive process so patterned areas transfer into the film stack.
Where it fits in the process flow
General reference — not yet source-verifiedAn etch system sits after pattern definition steps and before later film removal or device completion steps in a fab flow.
What do the numbers mean?
Power & electrical2
Vacuum & pumping2
- Dry Pump[1]
Wafer handling3
- HP+ Robot[1]
Control & software1
Configuration & options6
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Not publicly documented
The following facts about the Centura eMXP+ are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Centura eMXP+ are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Centura eMXP+ are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Centura eMXP+ are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Centura eMXP+ are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Centura eMXP+ is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Centura eMXP+ — Applied Materials | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 10, 2026.
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