Laurell
EDC-650-15B
The Laurell EDC-650-15B is an EDC System spin coater. The Laurell EDC-650-15B supports a maximum substrate size of 300 mm (9" x 9"). The Laurell EDC-650-15B has a maximum speed of 12,000 rpm.[1]
Wafer size
300mm
Vacuum
non-vacuum chucks[2]
What it is
How it works
What do the numbers mean?
Vacuum & pumping1
Wafer handling2
Configuration & options9
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Recommended chuck typenon-vacuum chucks[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What mounting options are available for the EDC-650-15B?
The mounting options include tabletop, in-deck, and on-deck configurations.[1]
Not publicly documented
The following facts about the EDC-650-15B are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EDC-650-15B are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the EDC-650-15B are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the EDC-650-15B are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the EDC-650-15B are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the EDC-650-15B is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]laurell.com — laurell.comlaurell.com
- [2]premier-sols.com — premier-sols.compremier-sols.com
- [3]Spin Coater - Laurell Model EDC-650-15B — laurell.comlaurell.com
Last updated Oct 9, 2026.
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The Laurell WS-650-15 B is a 650-series spin coater for resist processing that accommodates up to 300mm wafers and reaches 12,000 RPM.
The Laurell WS-650-15B is a spin coater in the 650 Series.
