Waferpedia

Comparison ledger

Scanner 203 BversusScanner 204 B

Nikon Scanner 203 B, Nikon Scanner 204 B, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMNikonNikon
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones1999 Manufacturing vintage—
Control system——
Generation——
FamilyNikon ScannerNikon Scanner
Specifications
Configuration0.18um[1]0.15um[2]
Resolution0.18um[1]0.15 µm[2]
Wafer Sizes6 inch, 8 inch[1]—
Vintage1999[1]2005[2]
Make—Nikon[2]
Model—Scanner 204 B[2]
Equipment type—Stepper[2]
Wafer sizes—6, 8 inch[2]
Category—Lithography[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com