Waferpedia

Nikon

Scanner 204 B

LithographyNikon Scanner family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Nikon Scanner 204 B is a lithography stepper manufactured by Nikon. The Nikon Scanner 204 B supports 6-inch and 8-inch wafers. The Nikon Scanner 204 B is specified at 0.15 µm.[1][2][3]

Nikon logo
Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

What it is

The Nikon Scanner 204 B is a lithography stepper.[1][2][3]

How it works

General reference — not yet source-verified

A lithography stepper exposes photoresist in a repeated sequence of alignment and projection exposures across a wafer.

A stepper in this class uses a mask or reticle, precision wafer positioning, and optical reduction to transfer circuit patterns onto the resist-coated wafer.

Where it fits in the process flow

General reference — not yet source-verified

A lithography stepper sits in the pattern-definition stage of semiconductor manufacturing.

The Nikon Scanner 204 B is used before downstream etch or deposition pattern transfer steps that follow resist patterning.

Applications

General reference — not yet source-verified

The Nikon Scanner 204 B is used for semiconductor photolithography on silicon wafers.

What do the numbers mean?

Wafer handling1

Wafer sizes
6, 8 inch[1]
Accurate?

Optics & imaging1

Resolution
0.15 µm[1]
Accurate?

Configuration & options6

0.15um[1]
Accurate?
Make
Nikon[1]
Accurate?
Model
Scanner 204 B[1]
Accurate?
Equipment type
Stepper[1]
Accurate?
Vintage
2005[1]
Accurate?
Category
Lithography[3]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What kind of lithography tool is the Nikon Scanner 204 B?

The Nikon Scanner 204 B is a lithography stepper.[1][2][3]

Not publicly documented

The following facts about the Scanner 204 B are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Scanner 204 B are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Scanner 204 B are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Scanner 204 B are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Scanner 204 B are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Scanner 204 B is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing
  3. [3]waferpedia.com — waferpedia.comwaferpedia.com
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Last updated Oct 7, 2026.

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