Nikon
Scanner 203 B
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
What it is
General reference — not yet source-verifiedLithography scanners are used in semiconductor manufacturing to transfer circuit patterns from a reticle onto a wafer coated with photoresist. The system employs a step-and-scan motion to expose each die field, then steps to the next field. The scanner reduces the reticle image through a projection lens system.
How it works
General reference — not yet source-verifiedThe system uses deep ultraviolet light from an excimer laser source. The light passes through illumination optics, the reticle, and a reduction projection lens before forming the image on the photoresist-coated wafer. Automatic alignment systems measure wafer and reticle positions to overlay successive layers accurately.
Where it fits in the process flow
General reference — not yet source-verifiedThe Nikon Scanner 203 B is used in the photolithography step of semiconductor fabrication. Before exposure, the wafer is cleaned, coated with photoresist, and soft-baked. After exposure, the wafer undergoes post-exposure bake, development, and etching to transfer the pattern into the underlying layers. The scanner is typically employed for critical layer patterning where tight overlay and resolution are required.
What do the numbers mean?
Vintage & configurations
- 1999Manufacturing vintage[1]
System vintage indicated as 1999
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Scanner 203 B are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented variants, configuration options, or revision breakpoints of the Scanner 203 B are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Scanner 203 B are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Scanner 203 B are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Scanner 203 B is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Scanner 203 B are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
Last updated Oct 1, 2026.
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