Zeiss
Sigma 300
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Zeiss Sigma 300 SEM is a field emission scanning electron microscope. The Zeiss Sigma 300 SEM offers superior low-kV performance approaching 1.5 nm at 1 kV. The Zeiss Sigma 300 SEM includes a 5-axis motorized eucentric specimen stage.[1]
What it is
The Zeiss Sigma 300 SEM is a field emission scanning electron microscope (FE-SEM). The instrument offers a low-kV performance approaching 1.5 nm at 1 kV. The microscope is located in the lower level cleanroom of MIT.nano.[1]
How it works
The Zeiss Sigma 300 SEM features a 5-axis motorized eucentric specimen stage with X and Y travel of 130 mm, Z travel of 50 mm, tilt range of -3° to 70°, and 360° rotation. The instrument is equipped with an Everhart–Thornley secondary electron detector and an in-lens secondary electron detector. The probe current ranges from 3 pA to 20 nA.[1]
What do the numbers mean?
Power & electrical1
Optics & imaging3
- Detectors
- Everhart Thornley Secondary Electron Detector; Inlens Secondary Electron Detector[1]
Configuration & options8
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Sigma 300 VP | — | — | — | manualslib.com[3] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Acceleration voltage0.02-30kV[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Sigma 300 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Sigma 300 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Sigma 300 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Sigma 300 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Sigma 300 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Sigma 300 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]nanousers.mit.edu — nanousers.mit.edunanousers.mit.edu
- [2]Inventory photo
- [3]manualslib.com — manualslib.commanualslib.com
Last updated Oct 7, 2026.
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