Veeco
Waferstorm M 3305 Lift Off
The Veeco Waferstorm M 3305 is a lift-off machine for wet processing. The Waferstorm M 3305 uses a centrifugal edge-grip spin chuck for 150 mm wafers.[1]
Wafer size
Robotic Wafer Handler:
Power
415 VAC[2]
What it is
The Veeco Waferstorm M 3305 is a lift-off machine designed for wet processing in semiconductor manufacturing. The machine is manufactured by Veeco, formerly SSEC (Solid State Equipment Corporation).[1][2][3]
The Veeco Waferstorm M 3305 handles 150 mm wafers and includes a spin chuck with centrifugal edge grip. The machine is equipped with a robotic wafer handler featuring horizontal, vertical, rotary, and paddle axes, as well as wafer scanners and alignment systems with color cameras and PC image processing.[1]
How it works
The Waferstorm M 3305 includes NMP (N-Methylpyrrolidone) fresh and re-circulated supply systems, which are used for dissolving the sacrificial layer. The machine also features a process monitor system and a spin chuck for wafer rotation during chemical application. The robotic handler transfers wafers between cassettes, buffer stations, and the process chamber.[1]
The system is equipped with a UPLA filter and air ionizer bar for ESD control, and a CO2 fire suppression system for the handler frame. The machine supports horizontal cassette loading with two MCPs (total eight 150 mm cassettes) and includes a buffer station with two slots.[1]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Chambers and internal structure have damages
- Perturbation of the chamber emits clicking noise
- Bent ceiling
- Damaged controller connectors
- Popped weld joints
- Bent exhaust
- De-mounted, loose tank
- Crushed E-connectors
- Bent filter brackets
- H2 Z-rail damage from H2
- Broken enclosure hardware
- Loose pumping line
- Shifted WS table
- Popped welding
- Pump 3 bracket bent
- Popped panel welds
- Bent and cracked panel
- Improperly mounted panel
What do the numbers mean?
Power & electrical5
Wafer handling9
- Qty 2 Horizontal Cassette Loading with 2 MCPs (8 total 150 mm Cassettes)[1]
- Cassette Loading
- Qty 2 Horizontal Cassette Loading with 2 MCPs (8 total 150 mm Cassettes)[1]
- Wafer size
- Wafer scanner with color camera for detecting double- and cross-slotted wafers[1]
- Wafer size
- Qty 2 Wafer alignment with LED backlight, color camera, and PC image processing[1]
Optics & imaging1
- Fire Suppression
- CO2 Fire Suppression System for 180" Frame: IR Detector, 120 Degrees Viewing Angle & Linear Heat Detector Wire[1]
Control & software4
Configuration & options21
- 300 Series[1]
- Stainless Steel with Mirror Finish[1]
- One Year Local SQL Storage[1]
- Raid Storage Configuration[1]
- SEMI Compliant[1]
- CE Marked[1]
- ETL Listed[1]
- 3 Color LED Status Light Tower (Red, Yellow, Green)[1]
- UPLA Filter with Air Ionizer Bar (Standard ESD Configuration)[1]
- Rear Keyboard & Monitor with Flip Up Keyboard Tray[1]
- Buffer Station, 2 Slots[1]
- NMP Fresh & Re-circulated Supply Systems[1]
- Process Monitor Systems[1]
- Chambers and internal structure have damages[1]
- HPC Arm Deflected[1]
- 2 CH[2]
- 30 A[3]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 300 Series | — | — | Stainless Steel with Mirror Finish, Windows 10 PC, SECS/GEM, additional features | Equipment inventory listing[1] |
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Tokyo Electron Expedius Plus— Same function class: Wet Processing / Clean, UnknownCompare in depthsource[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer size does the Veeco Waferstorm M 3305 support?
The Veeco Waferstorm M 3305 supports 150 mm wafers.[1]
Does the machine include SECS/GEM communication?
Yes, the Veeco Waferstorm M 3305 is equipped with SECS/GEM software and is SEMI compliant.[1]
What type of spin chuck does the Waferstorm M 3305 use?
The machine uses a 150 mm centrifugal edge grip spin chuck.[1]
Does the machine have a fire suppression system?
Yes, it includes a CO2 fire suppression system for the handler cover and frame, with IR detectors and linear heat detector wire.[1]
Not publicly documented
The following facts about the Waferstorm M 3305 Lift Off are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Waferstorm M 3305 Lift Off are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Waferstorm M 3305 Lift Off are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Waferstorm M 3305 Lift Off is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Waferstorm M 3305 Lift Off are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the Waferstorm M 3305 Lift Off are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]Inventory photo
- [4]Inventory photo
- [5]Inventory photo
Last updated Sep 28, 2026.
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