Tokyo Electron

Precio XL

Test & Probe Tokyo Electron Precio family

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The Tokyo Electron Precio XL is a production wafer prober. The Tokyo Electron Precio XL is a fully automatic wafer prober. The Tokyo Electron Precio XL supports 200 mm and 300 mm wafers.^[1]^[2]

Precio XL — Inventory photo — Fig. 01Precio XLInventory photo^[3]

What it is

The Tokyo Electron Precio XL is a wafer prober for semiconductor test and probe operations.^[1]^[2]^[9]

The Precio XL is an automatic wafer prober for 200 mm and 300 mm wafers.^[2]^[9]

How it works

The Precio XL uses a linear motor stage, and the model is specified with XY accuracy of 1.8 µm and Z accuracy of 5 µm.^[2]^[9]

Where it fits in the process flow

The Precio XL supports wafer-level electrical test on full wafers before downstream sorting, packaging, or final assembly steps.^[1]

Applications

The Precio XL is used for semiconductor wafer probing and wafer-level electrical test.^[1]

What do the numbers mean?

Wafer handling6

Single Open with Open Loader^[3]
Hot Chuck Function: 50~150 deg^[3]
Type: Automatic wafer prober^[9]
Wafer size: 200 mm, 300 mm^[2]
Functions: Focus OCR; hot chuck function 50~150 deg; WAPP function; 93K DD interface; flip SACC function; GPIB^[3]
Equipment type: Production Wafer Prober^[1]

Performance2

Accuracy: 1.8 µm^[2]
Z accuracy: 5 µm^[2]

Control & software1

93K DD Interface^[3]

Accurate?

Dimensions & facilities1

Probing force: 200 kg, 300 kg^[2]

Configuration & options10

Focus OCR^[3]; WAPP Function^[3]; Flip SACC Function^[3]; GPIB^[3]
Manufacturer: Tokyo Electron Limited^[2]
Model: Precio XL^[2]
Stage type: Linear Motor^[2]
Category: Test & Probe^[1]
Type: Automatic^[2]
Main features: TELPADS-I, Auto Leveling, CoSMOz^[9]

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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

Accretech UF 3000 Automatic Wafer— Same function class: Test & Probe, UnknownCompare in depthsource^[3]
Accretech UF 300 A Automatic Wafer— Same function class: Test & Probe, UnknownCompare in depthsource^[3]
Electroglas EG 4090 Automatic Wafer— Same function class: Test & Probe, nullCompare in depthsource^[3]
Accretech UF3000 Fully Automated— Same function class: Test & Probe, nullCompare in depthsource^[3]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What is the XY accuracy of the Precio XL?

The XY accuracy is 1.8 µm.^[2]^[9]

What is the Z accuracy of the Precio XL?

The Z accuracy is 5 µm.^[2]^[9]

What probing force options are available for the Precio XL?

The probing force can be 200 kg or 300 kg.^[2]^[9]

What type of stage does the Precio XL use?

The Precio XL uses a linear motor stage.^[2]^[9]

Not publicly documented

The following facts about the Precio XL are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Precio XL are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Precio XL are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Precio XL are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Precio XL are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Precio XL is not on record.
Answerable by: an OEM datasheet or a fab qualification report