Comparison ledger
Electroglas EG 4090 Automatic Wafer, Tokyo Electron Precio XL, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | EG 4090 Automatic WaferElectroglas | Precio XLTokyo Electron |
|---|---|---|
| OEM | Electroglas | Tokyo Electron |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2026 Still in service | — |
| Control system | — | — |
| Generation | — | — |
| Family | Electroglas EG 4090 | Tokyo Electron Precio |
| Cited variants | — | |
| Specifications | ||
| Configuration | Nickel Chuck[2] | Single Open with Open Loader[1] |
| Airblower | IH[2] | — |
| Armsize | IH Bernoulli[2] | — |
| Wafer Size Support | 150 mm and 200 mm wafers[6] | — |
| Chuck Type | Nickel or Gold, hot chuck[2] | — |
| Alignment Accuracy | Micron-level[6] | — |
| Input Voltage | 115VAC[7] | — |
| Vision Module | PRM-3[7] | — |
| Display Control Module | DCM II or DCM-2[7] | — |
| Material Handler Module | Station CONT (ESC) or MHCM[7] | — |
| Prober Control Module | Yes[7] | — |
| Cassette Loader | Yes[7] | — |
| Probing Modes | Manual, semi-automatic, and fully automatic[6] | — |
| Temperature Control | Hot chuck with temperature control (TC2000)[8] | — |
| Thinwafer Support | Yes (listed as option)[2] | — |
| Hot Chuck Function | — | 50~150 deg[1] |
| Manufacturer | — | Tokyo Electron Limited[9] |
| Model | — | Precio XL[9] |
| Type | — | Automatic wafer prober[10] |
| Wafer size | — | 200 mm, 300 mm[9] |
| Accuracy | — | 1.8 µm[9] |
| Z accuracy | — | 5 µm[9] |
| Probing force | — | 200 kg, 300 kg[9] |
| Stage type | — | Linear Motor[9] |
| Functions | — | Focus OCR; hot chuck function 50~150 deg; WAPP function; 93K DD interface; flip SACC function; GPIB[1] |
| Category | — | Test & Probe[11] |
| Equipment type | — | Production Wafer Prober[11] |
| Main features | — | TELPADS-I, Auto Leveling, CoSMOz[10] |
Plan your fab
Building a Test & Probe process? Get a complete equipment list.
Open the fab equipment planner →