SUSS MicroTec
Gamma 200 Spray
Plate 01Suss Gamma Spray Coater / Developer (2013 vintage) - Demonstration
Lithography Equipment SupportWatch on YouTube
What it is
The SUSS MicroTec Gamma 200 is a spray coater used in semiconductor manufacturing to apply photoresist and other coatings to wafers. The machine supports 8-inch wafer processing. The system includes a coat module, a develop module, a vapor prime (HMDS) module, oven hot plates, and cool plates. The Gamma 200 is equipped with an overhead HEPA filter and high-viscosity photoresist pumps.[1]
What do the numbers mean?
Vacuum & pumping2
- High Viscosity Photoresist Pumps[1]
Wafer handling1
Control & software1
- Julabo FL 601 Temperature Control Unit[1]
Configuration & options16
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What wafer sizes does the SUSS Gamma 200 support?
The SUSS Gamma 200 supports 8-inch wafers.[1]
Does the SUSS Gamma 200 include a temperature control unit?
The system includes a Julabo FL 601 Temperature Control Unit.[1]
Is the SUSS Gamma 200 equipped with a HEPA filter?
Yes, the system includes an overhead HEPA filter.[1]
Not publicly documented
The following facts about the Gamma 200 Spray are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Gamma 200 Spray are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Gamma 200 Spray are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Gamma 200 Spray are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Gamma 200 Spray are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Gamma 200 Spray is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Aug 20, 2026.