Tool family
The SUSS MicroTec Gamma is an automated photoresist and wet processing system for clean, reliable, and high-throughput photolithography processing.
The SUSS GAMMA Resist Coater is a 6-inch single block wafer coater.
The SUSS MicroTec Gamma Spray is a spray coater.
The SUSS MicroTec Gamma is an automated photoresist and wet processing system for clean, reliable, and high-throughput photolithography processing.
The SUSS GAMMA Resist Coater is a 6-inch single block wafer coater.
The SUSS MicroTec Gamma Spray is a spray coater.