STS
Multiplex ICP ASE Advanced Silicon Etch (ASE)
What it is
How it works
Applications
General reference — not yet source-verifiedThe equipment class is suited to patterned semiconductor features that need anisotropic plasma etching. The class is also used where process control depends on gas composition, RF power, and wafer temperature management.
What do the numbers mean?
Power & electrical8
Vacuum & pumping4
Wafer handling10
Gas & chemistry4
Configuration & options6
- He Backside Cooling 150mm clamp configuration[1]
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| STS Multiplex ICP ASE Advanced Silicon Etch (ASE) system, 6" - Manual load lock | — | — | Manual load lock; He Backside Cooling 150mm clamp configuration; ENI 300/30 Watt 13.56MHz RF power supply; Leybold Mag 2000CT Turbo pump with Leybold Mag Drive Controller; OnBoard gas panel. | Equipment inventory listing[1] |
| STS Multiplex ICP ASE Advanced Silicon Etch (ASE) system, 6" - Manual load lock – Carousel Loader | — | — | Manual load lock; Carousel Loader; He Backside Cooling 150mm clamp configuration; ENI ACG-3 300/30 Watt 13.56MHz RF power supply; Pfeiffer TMH 1000PC Turbo pump with Pfeiffer Turbo Controller; Remote gas panel. | Equipment inventory listing[2] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- ConfigurationENI 300/30 Watt 13.56MHz RF power supply[1]
- ConfigurationWith an ENI ACG-10B 1KW 13.56MHz RF Upper Electrode power supply[1]
- ConfigurationLeybold Mag 2000CT Turbo pump with Leybold Mag Drive Controller[1]
- ConfigurationOnBoard gas panel – 4 MFCs[1]
- Voltage208V, 60Hz, 50A 3 phase[1]
- ConfigurationENI ACG-3 300/30 Watt 13.56MHz RF power supply[2]
- ConfigurationPfeiffer TMH 1000PC Turbo pump with Pfeiffer Turbo Controller[2]
- ConfigurationRemote gas panel – 4 MFCs[2]
- RF power supplyENI 300/30 Watt 13.56MHz RF power supply[1]
- Upper electrode RF power supplyENI ACG-10B 1KW 13.56MHz RF Upper Electrode power supply[1]
- Turbo pumpLeybold Mag 2000CT Turbo pump with Leybold Mag Drive Controller[1]
- Turbo pumpPfeiffer TMH 1000PC Turbo pump with Pfeiffer Turbo Controller[2]
- Gas panelOnBoard gas panel – 4 MFCs[1]
- Gas panelRemote gas panel – 4 MFCs[2]
- Electrical208V, 60Hz, 50A 3 phase[1]
- RF power supplyENI ACG-3 300/30 Watt 13.56MHz RF power supply[2]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Multiplex ICP ASE Advanced Silicon Etch (ASE) are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Multiplex ICP ASE Advanced Silicon Etch (ASE) are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Multiplex ICP ASE Advanced Silicon Etch (ASE) are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Multiplex ICP ASE Advanced Silicon Etch (ASE) are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Multiplex ICP ASE Advanced Silicon Etch (ASE) is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Multiplex ICP ASE Advanced Silicon Etch (ASE) are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 5, 2026.
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