STS
M Plex Multiplex ICP
What it is
How it works
The STS M Plex Multiplex ICP is configured with a MAG 900 CT turbo pump and a roughing pump with code A532-80-905, a gas cabinet, and two ENI RF generators (ACG-10B and ACG-3B-06) with a phase shift controller. The system operates at 400 V, 50 Hz, three-phase power.[1]
What do the numbers mean?
Power & electrical5
Vacuum & pumping5
Wafer handling1
Control & software2
- LEP300 control server[1]
Configuration & options2
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Voltage400 V[1]
- Frequency50 Hz[1]
- Phase3 Phase[1]
- ConfigurationMAG 900 CT Turbo pump[1]
- ConfigurationLeybold Mag Drive 1000 pump controller[1]
- ConfigurationENI ACG-10B RF generator[1]
- ConfigurationENI ACG-3B-06 RF generator[1]
- ConfigurationBOC Edwards iQDP-80 roughing pump[1]
- Roughing Pump CodeA532-80-905[1]
- Turbo PumpMAG 900 CT Turbo pump[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the M Plex Multiplex ICP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the M Plex Multiplex ICP are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the M Plex Multiplex ICP are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the M Plex Multiplex ICP are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the M Plex Multiplex ICP are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the M Plex Multiplex ICP is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]STS M Plex Multiplex ICP family | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 10, 2026.
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