SPTS
CET25
The SPTS CET25 is a 25-wafer batch process module for HF vapor release etch for MEMS. The CET25 is designed for medium to high volume production applications.[1][2]
What it is
How it works
Where it fits in the process flow
Applications
The CET25 is used for HF vapor release etch for MEMS.[1][2][5]
The CET25 is intended for medium to high volume production applications.[1][2]
- MEMS
- Medium to high volume production applications
What do the numbers mean?
Vacuum & pumping1
- Key benefits
- High throughput; process chamber, gas and liquid panel, and pressure control components within a small footprint; extensive process control and monitoring functions[1]
Wafer handling1
Configuration & options4
Vintage & configurations
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Key benefitsHigh throughput; process chamber, gas and liquid panel, and pressure control components within a small footprint; extensive process control and monitoring functions[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What production setting is the CET25 aimed at?
The CET25 is designed for medium to high volume production applications.[1][2]
Not publicly documented
The following facts about the CET25 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the CET25 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the CET25 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the CET25 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the CET25 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the CET25 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (5)Every fact above is drawn from these public sources
- [1]web.archive.org — web.archive.orgweb.archive.org
- [2]CET25 — SPTS | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
- [3]fabsurplus.com — fabsurplus.comfabsurplus.com
- [4]auction.fabexchange.com — auction.fabexchange.comauction.fabexchange.com
- [5]SPTS CET25 family | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 10, 2026.
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