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Quintel

Q 4000 Mask

LithographyQuintel Q 4000 Mask family
Research Quality: 50% complete

The Quintel Q 4000 Mask is a lithography mask aligner. The Quintel Q 4000 Mask uses a 365–405 nm power supply source. The Quintel Q 4000 Mask has a fixed mask holder.[1][2]

Q 4000 Mask — Inventory photo
Fig. 01Q 4000 MaskInventory photo[1]

Power

365-405nm source[1]

Vacuum

Left side[1]

Optics

Mask aligner[1]

What it is

The Quintel Q 4000 Mask is a lithography mask aligner.[1][2][3][4]

The Q 4000 Mask belongs to the Quintel Q 4000 Mask family.[3]

How it works

The Q 4000 Mask includes a fixed mask holder, a sample holder vacuum chuck on a sliding stage, split-field objectives with zoom capabilities, a head-lift exposure source with zoom objectives, and controls for mask clamp, mask vacuum, clear, and load functions.[1][2][4]

Where it fits in the process flow

General reference — not yet source-verified

Mask alignment and exposure occur in the lithography part of semiconductor processing.

The Q 4000 Mask is used after a substrate has been prepared for pattern transfer and before later etch, deposition, or resist removal steps that follow lithographic exposure.

Applications

General reference — not yet source-verified

Mask aligners are used for photolithographic patterning of substrates in semiconductor and microfabrication work.

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • The mercury short arc lamp in the optical head may explode on start-up on very rare occasions.
  • The standard exposure illumination source emits ultraviolet radiation that is extremely dangerous to the eyes.

What do the numbers mean?

Power & electrical2

Quintel Power Supply 365-405nm source; bottom shelve right side.[1]
Accurate?
Power supply source
365-405nm source[1]
Accurate?

Vacuum & pumping4

Microscope illumination control panel & vacuum/ separation pressure gauge; left side.[1]
Accurate?
Sample holder vacuum chuck; sliding stage center.[1]
Accurate?
Expose/ mask clamp/ mask vacuum/ clear/ load buttons; right side.[1]
Accurate?
Illumination control panel and vacuum/separation pressure gauge
Left side[1]
Accurate?

Wafer handling4

Joy Stick 2, substrate manipulator; right side.[1]
Accurate?
Theta substrate adjustor; left side.[1]
Accurate?
Joy stick 2
Substrate manipulator; right side[1]
Accurate?
Theta substrate adjustor
Left side[1]
Accurate?

Optics & imaging12

Joy Stick 1, mask viewing manipulator; left side.[1]
Accurate?
Objective focus switch/ course align/ contact separation button; right side.[1]
Accurate?
Head Lift Exposure Source with zoom objectives; center.[1]
Accurate?
Mask Holder; center. (Note. Mask holder is fixed)[1]
Accurate?
Split field objectives with zoom capabilities; center. (Note. Zoom course top, zoom fine bottom)[1]
Accurate?
Objective slide knobs; located on right and left side of objective holder.[1]
Accurate?
Equipment type
Mask aligner[1]
Accurate?
Mask holder
Fixed[1]
Accurate?
Split field objectives
With zoom capabilities[1]
Accurate?
Head lift exposure source
With zoom objectives[1]
Accurate?
Joy stick 1
Mask viewing manipulator; left side[1]
Accurate?
Objective focus switch / coarse align / contact separation button
Right side[1]
Accurate?

Control & software3

MV200 view controller; top right.[1]
Accurate?
Parameter Control display panel; right side.[1]
Accurate?
Parameter control display panel
Right side[1]
Accurate?

Configuration & options5

Quintel Light Source A&B; under table[1]
Accurate?
Ultrak Monitor; top right.[1]
Accurate?
Power On switch; right side.[1]
Accurate?
Head Lift lock switch; right side.[1]
Accurate?
Power on switch
Right side[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationQuintel Power Supply 365-405nm source; bottom shelve right side.[1]
  • ConfigurationMicroscope illumination control panel & vacuum/ separation pressure gauge; left side.[1]
  • ConfigurationSample holder vacuum chuck; sliding stage center.[1]
  • ConfigurationExpose/ mask clamp/ mask vacuum/ clear/ load buttons; right side.[1]
  • Power supply source365-405nm source[1]
  • Illumination control panel and vacuum/separation pressure gaugeLeft side[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

Does the Q 4000 Mask have a fixed mask holder?

The Q 4000 Mask has a fixed mask holder.[1][2]

Where are the main controls located on the Q 4000 Mask?

The Q 4000 Mask has a parameter control display panel on the right side, a power on switch on the right side, a head lift lock switch on the right side, and an objective focus switch or coarse align or contact separation button on the right side.[1][2]

Not publicly documented

The following facts about the Q 4000 Mask are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Q 4000 Mask are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Q 4000 Mask are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Q 4000 Mask are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the Q 4000 Mask is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the Q 4000 Mask are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Q 4000 Mask — Quintel | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
  3. [3]Quintel Q 4000 Mask family | Waferpedia — waferpedia.comwaferpedia.com
  4. [4]https://kb.encs.vancouver.wsu.edu/wp-content/uploads/sites/7/2023/08/q4000_rev_c-1.pdf — kb.encs.vancouver.wsu.edukb.encs.vancouver.wsu.edu
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Last updated Oct 10, 2026.

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