Plasma-Therm
Unaxis 790 RIE
What it is
The Plasma-Therm Unaxis 790 RIE is a reactive ion etcher used for semiconductor etch processing.[1]
How it works
General reference — not yet source-verifiedA reactive ion etcher uses a plasma to remove material from exposed areas of a wafer surface. The process combines chemical reaction with ion-assisted directionality to shape etched features.
Where it fits in the process flow
General reference — not yet source-verifiedA reactive ion etcher sits in the pattern-transfer portion of semiconductor fabrication. The tool transfers lithographic patterns into a film or substrate after a mask or resist has defined the areas to be opened.
Applications
General reference — not yet source-verifiedReactive ion etchers are used for anisotropic dry etching of semiconductor films and patterned layers. The class is used where controlled feature transfer and directional etch profiles are needed.
What do the numbers mean?
Power & electrical2
- RF Source Gen Freq. = 13.56mhz[1]
Wafer handling1
Gas & chemistry2
- Gases:[1]
Configuration & options7
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Unaxis 790 RIE are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Unaxis 790 RIE are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Unaxis 790 RIE are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Unaxis 790 RIE are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Unaxis 790 RIE are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Unaxis 790 RIE is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Oct 6, 2026.
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