Pfeiffer
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The Pfeiffer Adixen ACP 40 G is a compact dry multi-stage Roots vacuum pump with a frictionless pumping module that requires no internal lubrication. The Pfeiffer Adixen ACP 40 G enables a maximum pumping speed of 40 cubic meters per hour per one source and a pumping speed of 37 m3/h / 22 CFM per another source. The Pfeiffer Adixen ACP 40 G is designed for clean and dry vacuum applications, including semiconductor fabrication processes such as load lock and transfer chamber pumping and wafer back pumping.[1][2]
The ACP 40 G is used for semiconductor fabrication, including load lock pumping, transfer chamber pumping, wafer back pumping, and process monitoring.[2]
The ACP 40 G is used in instrumentation and research applications including gas analysis, electronic microscopy, X-ray spectroscopy, leak detection, surface analysis, and focused ion beam work.[2]
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| ACP 40 G V8GACSFABF | — | — | G version pump compatible with pumping corrosive traces; equipped with 3 gas purge circuits to withstand gas traces, protect LP and HP ball bearings, and reinforced condensable gas pump tightness | ajvs.com[2] |
| ACP 40 G / V8GACSGABF | — | — | G version pump compatible with pumping of corrosive traces; equipped with 3 gas purge circuits; designed to protect the LP and HP ball bearings; condensable gas pump tightness is reinforced. | ajvs.com[2] |
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The following facts about the Adixen ACP 40 G are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Adixen ACP 40 G are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Adixen ACP 40 G are not on record.
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No publicly documented failure modes or field errata for the Adixen ACP 40 G are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Adixen ACP 40 G is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Adixen ACP 40 G are on record.
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Last updated Oct 7, 2026.