Comparison ledger
ABM -407B-2-S-CE-S293 Robot, Pfeiffer Adixen ACP 40 G, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Adixen ACP 40 GPfeiffer | |
|---|---|---|
| OEM | ABM | Pfeiffer |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ABM -407B-2-S-CE-S293 Robot | Pfeiffer Adixen ACP 40 G |
| Cited variants | — | |
| Specifications | ||
| Model | ABM-407B-2-S-CE-S293[2] | ACP 40 G[4] |
| Description | ROBOT[2] | Compact dry vacuum pump[3] |
| Refurbished RTP RTA | AG Associates 4100, 4108, 8108, 8800, 8800i,210, 310, 410, 610, 610I, MPT RTP-600S, 800S, RTP-3000[2] | — |
| KLA-Tencor Spare Parts and Service | RS-35C,RS-55,RS-75,RS-100,UV-1050,UV-1080,UV-1250,UV-1280,ASET F5 / F5X,AIT Systems,HRP-220 Stylus Profiler[2] | — |
| Refurbished Isotropic Plasma Etcher | Matrix, Tegal, Lam Research, Branson/IPC, PlasmaTherm[2] | — |
| Refurbished PECVD, ALD Equipment | Cambridge, Oxford PlasmaLab , Plasma-Therm, STS/SPTS, AMAT[2] | — |
| Refurbished Mask Aligner | Canon Neutronix PLA501/545, Suss MA200CC, MA8BA8 GEN3, MA8BA8 GEN2, MA8BA8, MA200E[2] | — |
| Refurbished Bonding | SUSS SB6E, SUSS SB8E, EVG 620 BA, EVG EV501, West Bond 7200AR 7400A[2] | — |
| Refurbished Wafer Prober | Electroglas EG 4090u+, EG 4090, EG 2001X, EG 1034X, Cascade PS-21[2] | — |
| Pump type | — | Multi-stage Roots primary pump[1] |
| Pumping principle | — | Frictionless technology; no seal between rotor and stator[3] |
| Maximum pumping speed | — | 40 cubic meters per hour[3] |
| Pumping speed | — | 37 m3/h / 22 CFM[1] |
| Ultimate pressure | — | 3 x 10-2 mbar[1] |
| Lubrication | — | No lubricant required[3] |
| Vacuum cleanliness | — | Oil-free vacuum with no backstreaming of hydrocarbon vapors; no particulate contamination[3] |
| Motor | — | Sealed air-cooled motor with permanent air cooling (built-in fan)[1] |
| Motor drive | — | Frequency converter-driven motor; single-phase frequency converter, multi-voltage, dual frequency 50/60 Hz[3] |
| Gas ballast | — | Three gas ballast options available; standard pumps equipped with a gas ballast device[3] |
| Condensable vapor handling | — | Up to 1,000 g/h of pure water vapor[3] |
| Body material | — | Aluminium pump body[1] |
| Purge circuits | — | Three gas purge circuits to protect LP and HP ball bearings and reinforced condensable gas pump tightness[1] |
| Serial link | — | RS 485[1] |
| Thermal protection | — | Thermal protection based on temperature sensors[1] |
| Manufacturer part numbers | — | 2000000552 / V8GACSGABF; V8GACSFABF[3] |
| Manufacturer | — | Pfeiffer / Adixen[4] |
| Equipment type | — | Pump[4] |
| Electrical phase | — | Single-phase[1] |
| Frequency | — | 50/60 Hz[1] |
| Communication | — | RS 485 serial link[1] |
| Gas ballast options | — | Three gas ballast options[3] |