Waferpedia

Nitto

HR 8500 III TW UV Detaper

Nitto Denko HR 8500 III TW UV Detaper is an 8-inch wafer tool. Nitto Denko HR 8500 III TW UV Detaper uses a one-board micro computer control method. Nitto Denko HR 8500 III TW UV Detaper includes a 3-axis type wafer transfer robot.[1]

HR 8500 III TW UV Detaper — Inventory photo
Fig. 01HR 8500 III TW UV DetaperInventory photo[1]

What it is

General reference — not yet source-verified

A UV detaper is a machine that removes UV-curable tape from semiconductor wafers after processing steps such as backgrinding or dicing. The tape holds the wafer during processing and is released by exposing it to ultraviolet light, which reduces the adhesive strength and allows mechanical peeling.

How it works

General reference — not yet source-verified

UV detapers operate by first exposing the taped wafer to ultraviolet light, which breaks down the adhesive bond between the tape and the wafer surface. After UV exposure, a mechanical peeling mechanism separates the tape from the wafer without applying excessive force to the fragile substrate.

Where it fits in the process flow

The HR 8500 III TW UV accepts eight-inch wafers and is configured for a cleanroom environment of Class 1,000 or above with temperature and humidity control.[1]

What do the numbers mean?

Power & electrical7

Power Supply:[1]
Accurate?
Single Phase[1]
Accurate?
AC 100 V ± 5%[1]
Accurate?
50/60 Hz[1]
Accurate?
For electrical power[1]
Accurate?
Power Supply
Single Phase; AC 100 V ± 5%; 1.5 kVA; 50/60 Hz[1]
Accurate?
Connection Port
For electrical power; For Air: Rc 3/8 screw; Lug with grounding linw (Cable Length: Approx. 5m)[1]
Accurate?

Wafer handling2

Wafer Transfer Robot
3-axis type[1]
Accurate?
Wafer Sizes
8 inch[1]
Accurate?

Control & software1

Control Method
One Board Micro Computer[1]
Accurate?

Configuration & options16

Installation Environment:[1]
Accurate?
Temperature
25 ± 5 degrees C[1]
Accurate?
Humidity
45 ± 15%[1]
Accurate?
Others
Clean level ; Class 1,000 or more (Place where it will be subjected to direct sunlight)[1]
Accurate?
Power
1.5 kVA[1]
Accurate?
Air Supply:[1]
Accurate?
Dry Air[1]
Accurate?
0.5 MPa or more[1]
Accurate?
250 NL/min or more[1]
Accurate?
Connection Port:[1]
Accurate?
For Air
Rc 3/8 screw[1]
Accurate?
Lug with grounding linw (Cable Length
Approx. 5m)[1]
Accurate?
OEM
Nitto Denko[1]
Accurate?
Model
HR 8500 III TW UV[1]
Accurate?
Clean level
Class 1,000 or more[1]
Accurate?
Air Supply
Dry Air; 0.5 MPa or more; 250 NL/min or more[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationPower Supply:[1]
  • ConfigurationSingle Phase[1]
  • ConfigurationAC 100 V ± 5%[1]
  • Configuration50/60 Hz[1]
  • ConfigurationFor electrical power[1]
  • Power SupplySingle Phase; AC 100 V ± 5%; 1.5 kVA; 50/60 Hz[1]
  • Connection PortFor electrical power; For Air: Rc 3/8 screw; Lug with grounding linw (Cable Length: Approx. 5m)[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Not publicly documented

The following facts about the HR 8500 III TW UV Detaper are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the HR 8500 III TW UV Detaper are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the HR 8500 III TW UV Detaper are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the HR 8500 III TW UV Detaper are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the HR 8500 III TW UV Detaper are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the HR 8500 III TW UV Detaper is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Oct 5, 2026.

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