Nikon

NSR S 307 E

Lithography Wafer X-Axis is out of order Nikon NSR family

Research Quality: 40% complete

The Nikon NSR S 307 E is a Deep UV lithography scanner. The Nikon NSR S 307 E uses an ArF excimer laser source at a wavelength of 193 nm. The Nikon NSR S 307 E achieves a resolution of <80 nm with a high NA lens of 0.85.^[1]^[2]

NSR S 307 E — Inventory photo — Fig. 01NSR S 307 EInventory photo^[1]

Wafer size

Wafer X-Axis is out of order

Performance

> 112 WPH^[2]

Optics

ArF excimer laser^[1]

What it is

The Nikon NSR S 307 E is a deep ultraviolet semiconductor lithography scanner. The machine uses an ArF excimer laser at 193 nm and is configured for 300 mm wafers.^[1]^[2]

How it works

The Nikon NSR S 307 E projects a reduced reticle image onto the wafer through projection optics. The model uses a reduction ratio of 1:4 and an exposure field of 26 by 33 mm.^[1]^[2]

Why won't it start?

Documented failure modes, common issues, and field considerations.

Wafer X-Axis is out of order

What do the numbers mean?

Wafer handling3

Wafer: 300 mm^[1]
Wafer size: Wafer X-Axis is out of order^[1]
Wafer Size Support: 200 mm / 300 mm^[2]

Optics & imaging10

Exposure Light Source: ArF excimer laser^[1]
Wavelength: 193^[1]
Resolution: 80 nm^[2]
Alignment Accuracy: 12 nm^[1]
Exposure Field: 26 x 33 mm^[1]; Lens Data^[3]
Wavelength: 193 nm^[2]
Light Source: ArF excimer laser^[1]
Lens NA: 0.85^[2]
Lens Data: Cymer XLA 140^[3]

Performance2

Throughput (300 mm): > 112 WPH^[2]
Throughput (200 mm): > 160 WPH^[2]

Configuration & options3

Reduction Ratio: 1:4^[1]; Hard Disk, 300mm^[3]; Cymer XLA 140^[3]

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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What wavelength does the Nikon NSR S 307 E use?

The Nikon NSR S 307 E uses 193 nm exposure light from an ArF excimer laser.^[1]^[2]

What is the exposure field of the Nikon NSR S 307 E?

The Nikon NSR S 307 E has an exposure field of 26 by 33 mm.^[1]^[2]

What reduction ratio does the Nikon NSR S 307 E use?

The Nikon NSR S 307 E uses a reduction ratio of 1:4.^[1]^[2]

Not publicly documented

The following facts about the NSR S 307 E are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSR S 307 E are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the NSR S 307 E are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the NSR S 307 E are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the NSR S 307 E is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the NSR S 307 E are on record.
Answerable by: an OEM parts catalog or a service engineer