MPI
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This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The TS 3000 uses programmable chuck motion, a programmable theta stage, integrated platen cooling, and integrated control software to position wafers and probes for measurement.[2]
The TS 3000 includes vacuum loading, safety interlocks, vibration isolation, and optional shielding and thermal-environment features for controlled probing.[2]
The TS 3000 supports front-side loading of wafers or single devices and is configured for measurement work that can include calibration substrates, probe cleaning, and contact checks.[2]
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| TS 3000-SE | — | — | Described for IV, CV, pulsed-IV, 1/f, and RF measurements; includes ShielDEnvironment, NoiseShield, and thermal-chuck options for wide temperature-range use. | mpi.com.tw[2] |
| TS 3000-HP | — | — | Described for high-voltage and high-current applications up to 10 kV and 600 A, with dedicated high-power probes and anti-arcing options. | mpi-corporation.com[3] |
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The TS 3000 supports loading or unloading of 150 mm, 200 mm, or 300 mm wafers or substrates.[2]
The TS 3000 is designed for DC-IV, DC-CV, pulsed-IV, RF, mmW, load-pull, IC design validation, and failure analysis applications.[2]
The chuck XY stage has a travel range of 310 mm by 335 mm, and the chuck Z stage has a travel range of 30 mm.[2]
The following facts about the TS 3000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the TS 3000 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the TS 3000 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the TS 3000 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the TS 3000 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the TS 3000 are on record.
Answerable by: an OEM parts catalog or a service engineer
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Last updated Oct 7, 2026.