MKS
The MKS 626D is an unheated absolute pressure transducer from the Baratron capacitance manometer family. The MKS 626D has a full scale pressure range of 0.1 to 1000 Torr. The MKS 626D has an accuracy of 0.25% to 0.50% of Reading.[1]
The MKS 626D is applicable to a range of vacuum-based processes, including thin-film deposition, etching, and other process steps that require accurate absolute pressure measurement. Because capacitance manometers are insensitive to gas composition, they are suitable for processes with varying gas mixtures. The compact design and ease of interfacing make it a common choice for integration into semiconductor process equipment.[1]
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The MKS 626D has a full-scale range from 0.1 to 1000 Torr, corresponding to 1.33 x 10^1 to 1.33 x 10^5 Pa.[1]
The MKS 626D provides accuracy of 0.25% to 0.50% of reading.[1]
The overpressure limit for the MKS 626D is 45 psia (310 kPa).[1]
The MKS 626D requires an input voltage of ±15 VDC.[1]
No, the MKS 626D is an unheated absolute pressure transducer.[1]
The following facts about the 626D are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 626D are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 626D are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 626D are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 626D are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 626D is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Sep 22, 2026.