MKS
The MKS 226B is a differential pressure transducer belonging to the Baratron family of capacitance manometers. The 226B is designed for all-purpose differential pressure measurement in vacuum and low-pressure gas environments. The transducer uses a capacitive diaphragm sensor to measure pressure independently of gas composition.[1]
The MKS 226B operates as a differential pressure transducer with two ports that allow measurement of the pressure difference between two volumes. The transducer can be calibrated for unidirectional or bidirectional pressure measurement. The MKS 226B uses a capacitive sensing element where pressure-induced diaphragm displacement changes the capacitance between the diaphragm and a fixed electrode. The electronics convert this capacitance change into a linear voltage output.[1]
The MKS 226B transducer provides a full-scale range selectable from twenty-six to one hundred thirty-three thousand pascals, equivalent to zero point two to one thousand torr. Accuracy is specified as either zero point three percent or zero point five percent of full scale, or optionally zero point three percent of reading for unidirectional calibrations. The overpressure limit is one hundred forty kilopascals, equivalent to one thousand fifty torr.[1]
Differential pressure transducers like the MKS 226B may be positioned upstream or downstream of a pressure control valve or across a particulate filter. The differential measurement allows closed-loop control of gas flow or chamber pressure relative to a reference. The unidirectional calibration option supports applications where the pressure difference is always in one direction, such as across a pump inlet filter.[1]
Outside of semiconductor fabrication, the MKS 226B may be used in industrial processes such as vacuum coating, freeze drying, and gas handling systems. The transducer provides a reliable measurement for differential pressure at low absolute pressures where other gauge technologies are less stable. The optional zero point three percent of reading accuracy improves performance at the low end of the pressure range.[1]
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The MKS 226B has a full-scale range of 26 to 1.33×10⁵ Pa, equivalent to 0.2 to 1000 Torr.[1]
The MKS 226B offers two accuracy levels: 0.3% or 0.5% of Full Scale. There is also an option of 0.3% of reading for unidirectional calibration.[1]
Yes, the MKS 226B supports either unidirectional or bidirectional calibration.[1]
The overpressure limit is 140 kPa, equivalent to 1050 Torr.[1]
The following facts about the 226B are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 226B are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 226B are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 226B are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 226B are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 226B is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Sep 22, 2026.