Waferpedia

Meyer Burger

TS 121

Dicing & GrindingMeyer Burger TS 121 family
Research Quality: 50% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

TS 121 — Inventory photo
Fig. 01TS 121Inventory photo[1]

What it is

General reference — not yet source-verified

The Meyer Burger TS 121 is a saw designed for cutting hard and brittle materials. Wire saws used for slicing ingots into wafers are a common type of equipment in the photovoltaic and semiconductor industries.

How it works

General reference — not yet source-verified

Wire saws operate by moving a wire or a set of wires across the workpiece while the workpiece is fed against the wire. The cutting action is aided by an abrasive slurry or by diamond grains bonded to the wire, which erode the material as the wire traverses.

Where it fits in the process flow

General reference — not yet source-verified

The saw is used in the wafering step of semiconductor and photovoltaic manufacturing, where it cuts ingots into thin wafers. Upstream processes include ingot growth and preparation; downstream processes include wafer cleaning, polishing, and further device fabrication steps.

What do the numbers mean?

Power & electrical2

Voltage
480V[1]
Accurate?
Power
480V - 12A - 60Hz[1]
Accurate?

Configuration & options6

12A[1]
Accurate?
Frequency
60Hz[1]
Accurate?
Equipment type
Saw[1]
Accurate?
Make
Meyer Burger[1]
Accurate?
Model
TS 121[1]
Accurate?
Vintage
1991[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Voltage480V[1]
  • Power480V - 12A - 60Hz[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What level of precision is achievable with such machines?General reference — not yet source-verified

Dicing and grinding systems are capable of sub-micrometer precision in kerf width and thickness control. The exact precision depends on the specific machine model, blade quality, and process conditions, but class-level machines are built to meet the stringent tolerances required for modern semiconductor devices.

What maintenance is typically required?General reference — not yet source-verified

Regular maintenance includes replacing dicing blades and grinding wheels as they wear, cleaning coolant filters, and inspecting spindles and motion stages. The dressing of blades and wheels may be performed automatically or periodically to sustain cut quality and surface finish.

Not publicly documented

The following facts about the TS 121 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the TS 121 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the TS 121 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the TS 121 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the TS 121 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the TS 121 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]Products and Systems — meyerburger.com (Sep 25, 2017)web.archive.org
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Last updated Oct 2, 2026.

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