Mattson

Steag / AST 2800 RTP

Thermal / Diffusion Mattson Steag family

Research Quality: 40% complete

The Mattson / Steag / AST 2800 RTP System is a rapid thermal processing (RTP) system. The tool's designation is Mattson / Steag / AST 2800.^[1]^[2]^[3]^[4]^[5]

Steag / AST 2800 RTP — Inventory photo — Fig. 01Steag / AST 2800 RTPInventory photo^[1]

What it is

The Mattson / Steag / AST 2800 RTP System is a rapid thermal process system. The available descriptions identify it by make as Mattson / Steag / AST and by model as 2800.^[1]^[2]^[3]^[4]^[5]

Why won't it start?

Documented failure modes, common issues, and field considerations.

Missing parts

What do the numbers mean?

Power & electrical4

Phase: 3 Phase^[2]
Frequency: 50 Hz^[2]
Voltage: 208V^[2]
Voltage: 400V^[3]

Configuration & options4

Missing parts^[1]
Model: 2800^[1]
Make: Mattson / Steag / AST^[1]
Asset #: 83206^[1]

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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

Phase3 Phase^[2]
Frequency50 Hz^[2]
Voltage208V^[2]
Voltage400V^[3]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What manufacturer and model designation applies to the system?

The system is a Mattson / Steag / AST 2800 rapid thermal processing system.^[1]^[2]^[3]^[4]^[5]

What type of equipment is the 2800?

The 2800 is a rapid thermal process (RTP) system.^[1]^[2]^[3]^[4]^[5]

Not publicly documented

The following facts about the Steag / AST 2800 RTP are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Steag / AST 2800 RTP are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Steag / AST 2800 RTP are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Steag / AST 2800 RTP are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the Steag / AST 2800 RTP is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Steag / AST 2800 RTP are on record.
Answerable by: an OEM parts catalog or a service engineer