Waferpedia

Laurell

EDC-650-8 B

The Laurell EDC-650-8 B is an EDC System in the 650-series. The Laurell EDC-650-8 B has a maximum substrate size of ø 200mm (7" × 7"). The Laurell EDC-650-8 B has a maximum speed of 12000 rpm.[1]

LaurellEDC-650-8 B
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What it is

General reference — not yet source-verified

Spin coaters are machines that deposit thin, uniform liquid films onto flat substrates by centrifugal force. The EDC designation typically indicates integrated dispensing functionality, enabling automated application of coating materials during the spin process.

Where it fits in the process flow

General reference — not yet source-verified

Spin coating is a key step in photolithography, performed after substrate cleaning and surface preparation, and before soft baking and exposure. The EDC-650-8 B applies a uniform photoresist layer that will later be patterned and developed to form device features. Downstream processes include prebake, mask alignment, exposure, development, and etching.

What do the numbers mean?

Wafer handling1

Max. substrate size
ø 200mm (7" × 7")[1]
Accurate?

Control & software1

Controller
650-series[1]
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Configuration & options5

OEM
Laurell[1]
Accurate?
Model
EDC-650-8 B[1]
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Model type
EDC System[1]
Accurate?
Max. RPM
12000 rpm[1]
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Mounting options
Tabletop, In-Deck, On-deck[1]
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Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the EDC-650-8 B are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EDC-650-8 B are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the EDC-650-8 B are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the EDC-650-8 B are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the EDC-650-8 B are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the EDC-650-8 B is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]images.laurell.com — images.laurell.comimages.laurell.com
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Last updated Oct 7, 2026.

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