Lam Research
Rainbow 4520 XL
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Lam Research Rainbow 4520 XL is a plasma etch tool for 6-inch wafers. The Rainbow 4520 XL Dielectric variant supports gases including C4F8, SF6, CHF3, CH3F, Ar, O2, N2, and CF4 for dielectric etching.[1]
What it is
How it works
The Rainbow 4520 XL Dielectric supports C4F8, SF6, CHF3, CH3F, Ar, O2, N2, and CF4 for dielectric etching.[1]
Applications
The Rainbow 4520 XL Dielectric is used for dielectric etching in semiconductor manufacturing.[1]
What do the numbers mean?
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Rainbow 4520 XL Dielectric | — | — | Dielectric etch variant supporting specific gases: C4F8, SF6, CHF3, CH3F, Ar, O2, N2, CF4 | waferpedia.com[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- GasesC4F8, SF6, CHF3, CH3F, Ar, O2, N2, CF4[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the Rainbow 4520 XL are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Rainbow 4520 XL are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the Rainbow 4520 XL are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Rainbow 4520 XL are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Rainbow 4520 XL is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the Rainbow 4520 XL are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]waferpedia.com — waferpedia.comwaferpedia.com
- [2]inventory listing
- [3]Rainbow 4520 XL — Lam Research | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
Last updated Oct 10, 2026.