Lam Research Rainbow 4520

Models in this family

1. 

   4520

   The Lam Research 4520 is an etcher with Envision Software, a Hine cassette indexer load/unload, an entrance loadlock, a remote AC panel, and a main chamber with a top actuate clamping system.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Lam Research Rainbow 4520	—	—	Described as the Rainbow 4520 etch system.	semigroup.com[1]

2. 

   4520 ENV

   The Lam 4520 ENV is an etcher identified by model name 4520 ENV.

3. 

   4520 i Oxide

   The Lam 4520 i Oxide Etcher is a 6-inch oxide etcher configured with an ESC clamp type, a bulkhead system mount, and a listed software version of Classic 7,31-42.

4. 

   4520 i XL Stand Alone

   The Lam 4520 i XL Stand Alone is a Lam Research equipment model configured for 8-inch wafers.

5. 

   4520 Oxide

   The Lam Research 4520 Oxide Etch is a single-wafer, vacuum load-locked low-pressure plasma etch system designed for oxide etching, including contact etch and planarization, for wafers up to 200 mm.

6. 

   4520 XL
7. 

   4520 XLE

   The Lam 4520 XLE is an etcher manufactured by Lam that supports 8-inch wafers.

8. 

   Rainbow 4520

   Lam Research Rainbow 4520 is a single-wafer plasma/RIE etching system described as part of the Rainbow 45XX series.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Lam Rainbow 45XX Series	—	—	Series described as a fully automated, in-line, single-wafer plasma/RIE etching system with programmable switching between plasma and RIE modes.	allwin21.com[2]

9. Rainbow 4520 i
10. 

    Rainbow 4520 Plasma RIE

    The Lam Rainbow 4520 is a plasma reactive ion etcher (RIE) offered in 6-inch and 8-inch wafer configurations.

11. Rainbow 4520 XL

    The Lam Research Rainbow 4520 XL is a plasma etcher designed for processing 6-inch wafers in semiconductor manufacturing.

    Cited variants

    Designation	Generation	Vintage	Changes	Source
    Rainbow 4520 XL Dielectric	—	—	Dielectric etch variant supporting specific gases: C4F8, SF6, CHF3, CH3F, Ar, O2, N2, CF4	waferpedia.com[3]

12. 

    Rainbow 4520 XL Dielectric

    The Lam Rainbow 4520 XL Dielectric is an etch tool for 6-inch wafers.

Sources