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KLA

4PP-TypeH

KLA 4PP-TypeH family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The KLA 4PP-TypeH is a four-point probe. The KLA 4PP-TypeH has 0.6mm spacing, 200um tip radius, and 100gm force. The KLA 4PP-TypeH is designed for implant/high impedance surface measurement.[1][2]

4PP-TypeH — store.kla-instruments.com
Fig. 014PP-TypeHstore.kla-instruments.com[3]

What is it?

Applications

The KLA 4PP-TypeH is intended for implant and high-impedance surface measurement.[1][2]

What do the numbers mean?

Configuration & options9

Product type
Four-point probe (4PP)[3]
Accurate?
Probe spacing
0.6mm[1]2 sources
Accurate?
Tip radius
200um[1]2 sources
Accurate?
Force
100gm[1]
Accurate?
Load
100gm[2]
Accurate?
Material
230-0920[2]
Accurate?
Intended use
Implant/high impedance surface measurement[2]
Accurate?
Compatible systems
Filmetrics R50 / R54 4PP measurement systems[2]
Accurate?
Manufacturer
Filmetrics[1]
Accurate?
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What are the pin spacing and tip radius of the KLA 4PP-TypeH?

The pin spacing is 0.6 mm and the tip radius is 200 µm.[1][2]

What contact force does the 4PP-TypeH apply?

The probe applies a contact force of 100 grams.[1][2]

What types of surfaces is the 4PP-TypeH designed to measure?

The probe is designed for implant layers and high-impedance surface measurement.[1][2]

Which sheet-resistance measurement systems are compatible with the 4PP-TypeH?

The probe is compatible with Filmetrics R50 and R54 measurement systems.[2]

Not publicly documented

The following facts about the 4PP-TypeH are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 4PP-TypeH are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 4PP-TypeH are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 4PP-TypeH are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 4PP-TypeH are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 4PP-TypeH is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (3)Every fact above is drawn from these public sources
  1. [1]cntech.co.uk — cntech.co.ukcntech.co.uk
  2. [2]store.kla-instruments.com — store.kla-instruments.comstore.kla-instruments.com
  3. [3]store.kla-instruments.com — store.kla-instruments.comstore.kla-instruments.com
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Last updated Oct 10, 2026.

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