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Edwards

NRC 3117 Thermal

DepositionEdwards NRC 3117 Thermal family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

NRC 3117 Thermal — Inventory photo
Fig. 01NRC 3117 ThermalInventory photo[1]

What it is

The Edwards NRC 3117 Thermal is a deposition tool.[2]

The Edwards NRC 3117 Thermal is a thermal evaporator.[1][2]

How it works

The Edwards NRC 3117 Thermal belongs to the evaporation class of deposition equipment.[1][2]

Where it fits in the process flow

General reference — not yet source-verified

Thermal evaporation sits in the thin-film deposition portion of a semiconductor or precision-coatings process flow.

Thermal evaporation is used after a substrate is prepared and before later patterning or integration steps that use the deposited film.

Applications

General reference — not yet source-verified

Thermal evaporators are used to deposit thin films for electronic and microfabrication processes.

Thermal evaporation is commonly used for vacuum-deposited metal films and other materials that can be vaporized by heating.

What do the numbers mean?

Configuration & options4

Manufacturer
Edwards[2]
Accurate?
Model
NRC 3117 Thermal[1]
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Equipment type
Thermal Evaporator[1]
Accurate?
Category
Deposition[2]
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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What is the Edwards NRC 3117 Thermal?

The Edwards NRC 3117 Thermal is a thermal evaporator in the deposition category.[1][2]

What category is the tool placed in?

The tool is placed in the deposition category.[2]

Not publicly documented

The following facts about the NRC 3117 Thermal are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NRC 3117 Thermal are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the NRC 3117 Thermal are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the NRC 3117 Thermal are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the NRC 3117 Thermal are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the NRC 3117 Thermal is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
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Last updated Oct 8, 2026.

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