Edwards
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The Edwards EPX 500 LE is a high-vacuum primary dry vacuum pump. The Edwards EPX 500 LE has an ISO 160 inlet. The Edwards EPX 500 LE uses integrated water cooling.[1]
The Edwards EPX 500 LE is a dry vacuum pump capable of pumping from atmosphere to high vacuum.[2][1]
The pump achieves an ultimate pressure of less than 7 x 10-7 Torr.[1][2]
The Edwards EPX 500 LE has no lubricating or sealing fluid in the pumping chamber.[1]
The pump uses an integrated water cooling circuit for the stator and enclosed motor.[1]
The Edwards EPX 500 LE includes an EMC supply filter and an inverter drive that controls motor speed based on inlet pressure.[1]
The pump has an End User Controller (EUC) for local or remote control and monitoring via a fab-wide network.[1]
The Edwards EPX 500 LE is 20% lighter, 30% smaller, and requires 40% less power than the IPX series.[1]
The pump has a pumping speed of 295 CFM and weighs 99 lbs.[2]
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The following facts about the EPX 500 LE are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the EPX 500 LE are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the EPX 500 LE are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the EPX 500 LE are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the EPX 500 LE are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the EPX 500 LE is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Oct 9, 2026.