Disco
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The Disco DFD 6363 is a fully automatic dicing saw that is the flagship model for φ300 mm wafers. The DFD 6363 supports a facing dual spindle and is DBG compatible. The DFD 6363 offers high process extensibility, supporting both frame and two-way transfer, and can handle various processes including full cut and half cut.[1]
The DFD 6363 uses a lower arm to retrieve the workpiece from the cassette and perform centering at a pre-alignment stage. The lower arm then moves the workpiece to the chuck table for cutting. After cutting, the upper arm moves the workpiece to a spinner table for cleaning and drying. The lower arm returns the workpiece to the cassette. The machine incorporates Non-Contact Setup (NCS) to detect the blade tip position without contact, preventing blade damage and improving processing quality. Multiple height control options are available, including laser sensor method, back pressure method, and touch sensor method for different workpiece types. The machine also features idling control to automatically perform warm-up after prolonged stops to ensure stable processing accuracy.[1]
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The DFD 6363 can handle wafers up to 300 mm in diameter.[1][2]
The standard spindle is 1.8 kW with a rotation speed of 60,000 min-1. Optional spindles include a high-speed 80,000 min-1 spindle and a high-torque 2.2 kW spindle.[1]
Yes, the DFD 6363 can be equipped with an Automatic Blade Changer (ABC) that detects blade end of life and automatically replaces the blade.[1]
The DFD 6363 supports both frame transfer and wafer transfer, and it can handle standard cassettes (200 mm and 300 mm) as well as FOUP cassettes.[1]
The X-axis cutting range is 310 mm.[2]
The following facts about the DFD 6363 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the DFD 6363 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the DFD 6363 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the DFD 6363 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the DFD 6363 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the DFD 6363 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
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Last updated Sep 26, 2026.