Canon

FPA 3000 i 5 ++ i-Line

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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Canon FPA 3000 i 5 ++ is an i-line stepper designed for 8-inch wafers.^[1]

FPA 3000 i 5 ++ i-Line — Inventory photo — Fig. 01FPA 3000 i 5 ++ i-LineInventory photo^[2]

What it is

The Canon FPA 3000 i 5 i-Line Stepper supports 8-inch wafers. Variants of the model include the FPA 3000 i 5, the FPA 3000 i 5 +, and the FPA 3000 i 5 ++.^[1]^[10]^[11]^[2]

Where it fits in the process flow

General reference — not yet source-verified

In a semiconductor fabrication line, the stepper is used in the photolithography process step. Photoresist is first coated onto the wafer, then the stepper exposes the resist through the reticle. After exposure, the wafer moves to develop, etch, and other processing steps. The stepper is a critical tool for defining the smallest features on the wafer.

What do the numbers mean?

Wafer handling1

Wafer size: 8 inch^[1]

Optics & imaging1

Exposure wavelength: i-line^[1]

Configuration & options4

Refurbished to run 150mm Saphhire (2017)^[2]
Type: i-Line Stepper^[1]
Make: Canon^[1]
Model: FPA 3000 i 5 ++^[1]

Vintage & configurations

Documented models & variants

Designation	Generation	Vintage	Changes	Source
FPA 3000 i 5 +	i-line	—	—	Equipment inventory listing^[10]
FPA 3000 i 5 (refurbished for 150mm sapphire)	—	—	Refurbished to run 150mm sapphire	Equipment inventory listing^[2]

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What replaced it?

Alternatives

Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.

Nikon NSR SF 155 i-Line— Same function class: Lithography, nullCompare in depthsource^[1]
Nikon SF 130— Same function class: Lithography, nullCompare in depthsource^[1]

Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What wafer size does the Canon FPA 3000 i 5 support?

The Canon FPA 3000 i 5 supports 8-inch wafers.^[1]^[10]^[11]^[2]

Not publicly documented

The following facts about the FPA 3000 i 5 ++ i-Line are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the FPA 3000 i 5 ++ i-Line are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the FPA 3000 i 5 ++ i-Line are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the FPA 3000 i 5 ++ i-Line are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the FPA 3000 i 5 ++ i-Line is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the FPA 3000 i 5 ++ i-Line are on record.
Answerable by: an OEM parts catalog or a service engineer