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017-0024-01 PrealignerversusFPA 3000 i 5 ++ i-Line

Brooks 017-0024-01 Prealigner, Canon FPA 3000 i 5 ++ i-Line, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
017-0024-01 PrealignerBrooks
FPA 3000 i 5 ++ i-LineCanon
OEMBrooksCanon
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0024-01 PrealignerCanon FPA 3000
Cited variants—
  • FPA 3000 i 5 +i-line[1]
  • FPA 3000 i 5 (refurbished for 150mm sapphire)[2]
Specifications
Configuration—Refurbished to run 150mm Saphhire (2017)[2]
Exposure wavelength—i-line[3]
Wafer size—8 inch[3]
Type—i-Line Stepper[3]
Make—Canon[3]
Model—FPA 3000 i 5 ++[3]
017-0024-01 Prealigner entryFPA 3000 i 5 ++ i-Line entryAsk about these tools →Share experience with this comparison →

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing