ASML
Twinscan XT 1250 D
Wafer size
Continuous clampable wafer table for dry WSs: Absent
Performance
Disabled[1]
Optics
Heidenhain Encoders[1]
What it is
How it works
The machine uses a dual-wafer-stage system that enables one wafer to be aligned and measured while another is being exposed, reducing overhead. The system's wafer stage is of Type 2 configuration and uses stainless steel balance masses, and the reticle stage uses a glued leafspring chuck with pneumatic gripping.[1]
The scanner incorporates an integrated reticle inspection system (IRIS) for reticle quality checking and an integrated reticle library (IRL) for storage. The system is configured with a dry wafer stage and does not support immersion hoods.[1]
Where it fits in the process flow
The scanner is equipped with wafer tracks (wafer handling robots) and a double-fold-arm wafer-handling robot with a 12 mm Z stroke for wafer transfer. The system also has docking plates and is configured for reticle exchange using the Retex option.[1]
What do the numbers mean?
Wafer handling22
Optics & imaging5
- Safeguard to prevent loading of reticles with too wide or mispositioned pellicles: Disabled[1]
Performance1
Configuration & options7
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
What type of wafer stage does the ASML Twinscan XT 1250 D use?
The ASML Twinscan XT 1250 D uses a dual-chuck wafer stage configured as Wafer Stage type 2.[1]
Does the ASML Twinscan XT 1250 D support immersion lithography?
No, the ASML Twinscan XT 1250 D is configured for dry processing and does not support immersion hoods.[1]
What type of reticle stage measurement system does it use?
The reticle stage uses Heidenhain encoders for position measurement.[1]
How many wafers can each carrier hold?
Each carrier can hold 25 wafers.[1]
Not publicly documented
The following facts about the Twinscan XT 1250 D are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Twinscan XT 1250 D are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the Twinscan XT 1250 D are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the Twinscan XT 1250 D are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the Twinscan XT 1250 D are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the Twinscan XT 1250 D is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Inventory photo
Last updated Sep 22, 2026.
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