ASML
5500 350 C
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The ASML PAS 5500/350C is a DUV stepper used in photolithography. The PAS 5500/350C is typically configured as part of a lithography cluster with a TEL Clean Track ACT-8 coater/developer for processing 100 mm wafers. The PAS 5500/350C was manufactured in 1997 and includes a Cymer ELS 5600 excimer laser.[1][2]
What it is
How it works
Where it fits in the process flow
The ASML 5500 350 C operates with a coater and developer track in line with the stepper to form a lithography cluster for wafer processing.[1]
Applications
The ASML PAS 5500 family is used for integrated-circuit patterning in semiconductor manufacturing.[3]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Conversion to 150 mm (6") is possible, but it requires mechanical work on the track and extensive setup on the stepper.
- Wafers going through the track must have a clean backside.
- Small particles can hinder printing of small features and contaminate the wafer stage.
- Wafer stage cleaning is described as delicate, complex, wearing, and time-consuming.
- Users liable of wafer stage contamination may lose access to the machine.
What do the numbers mean?
Wafer handling2
Gas & chemistry1
Optics & imaging1
Configuration & options8
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| PAS 5500/350C | — | — | — | epfl.ch[1] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Cluster configurationIn-line with TEL Clean Track ACT-8 coater/developer[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What is the model designation?
The model designation is ASML 5500 / 350 C.[2]
Not publicly documented
The following facts about the 5500 350 C are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 5500 350 C are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the 5500 350 C are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the 5500 350 C is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the 5500 350 C are on record.
Answerable by: an OEM parts catalog or a service engineer
No publicly hosted manuals, SOPs, or datasheets for the 5500 350 C are on record.
Answerable by: university cleanroom staff or an OEM application specialist
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]epfl.ch — epfl.chepfl.ch
- [2]Inventory photo
- [3]ASML: Products - PAS 5500/1150C — asml.com (Jun 9, 2015)web.archive.org
Last updated Oct 4, 2026.
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