Waferpedia

Tool family

Nordson March

NordsonEtch2 entries
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Models in this family

  1. March AP 1000

    The Nordson March AP 1000 is a plasma system used for etching, operating at 50 Hz with a CB current of 25 A and an SCCR of 10 kA.

  2. March AP 300

    The Nordson March AP 300 is a plasma system with a 300 Watt, 13.56 MHz RF generator and an integrated RF automated tuning network assembly.

All entries

  1. March AP 1000Nordson

    The Nordson March AP 1000 is a plasma system used for etching, operating at 50 Hz with a CB current of 25 A and an SCCR of 10 kA.

    CategoryEtch
    9 specs
  2. March AP 300Nordson

    The Nordson March AP 300 is a plasma system with a 300 Watt, 13.56 MHz RF generator and an integrated RF automated tuning network assembly.

    CategoryEtch
    23 specs