Waferpedia

Tool family

ASML TWINSCAN NXE:3800E

ASMLLithography1 entry

The TWINSCAN NXE:3800E is a dual-stage EUV lithography system designed by ASML for high-volume manufacturing of advanced Logic and Memory chips.

Models in this family

  1. The TWINSCAN NXE:3800E is a dual-stage EUV lithography system designed by ASML for high-volume manufacturing of advanced Logic and Memory chips.