Comparison ledger
Nova V 2600, SCREEN AS 2000, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | V 2600Nova | AS 2000SCREEN |
|---|---|---|
| OEM | Nova | SCREEN |
| Category | CMP | CMP |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Nova V 2600 | SCREEN AS 2000 |
| Specifications | ||
| Configuration | Integrated CMP Endpoint / Film Measurement[2] | Dual brush and top side brush chambers, spin dry[3] |
| Wafer Size | 12 inch[1] | 8 inch[5] |
| Integrated System | CMP Endpoint / Film Measurement[2] | — |
| Integrated CMP Endpoint / Film Measurement | Yes[1] | — |
| Gas | — | 1:100 DHF, 1:100 NH4OH[3] |
| OS | — | Windows NT[3] |
| Power | — | 0.750KVA transformer[4] |
| Missing | — | HLS cards / condition not well[4] |
| Brush Chambers | — | Dual brush and top side brush chambers[3] |
| Spin Dry | — | Yes[3] |
| Process Gases | — | 1:100 DHF, 1:100 NH4OH[3] |
| Operating System | — | Windows NT[3] |
| Vintage Year (example unit) | — | 1998[3] |
| Vintage Year (another unit) | — | 1999[4] |