SCREEN
AS 2000
What it is
The SCREEN / DNS AS 2000 is a chemical mechanical polisher (CMP) used in semiconductor manufacturing. The AS 2000 handles wafers with an diameter of 8 inches. The AS 2000 is a CMP system from the Japanese manufacturer SCREEN Semiconductor Solutions (formerly Dainippon Screen Mfg. Co., Ltd., also referred to as DNS).[3][1][2][10]
Why won't it start?
Documented failure modes, common issues, and field considerations.
- Missing: HLS cards / condition not well
What do the numbers mean?
Power & electrical3
Wafer handling1
Gas & chemistry5
Control & software2
- FA-21000A PC[1]
Configuration & options14
What replaced it?
Alternatives
Tools documented as functional equivalents — same process step and wafer size, from a different manufacturer. Each equivalence cites its source.
- Nova V 2600— Same function class: CMP, nullCompare in depthsource[4]
- Lapmaster 72— Same function class: CMP, nullCompare in depthsource[5]
- Lam Research IPEC 472— Same function class: CMP, nullCompare in depthsource[6]
- Lam Research IPEC AvantGaard 776— Same function class: CMP, nullCompare in depthsource[7]
- Applied Materials Reflexion— Same function class: CMP, nullCompare in depthsource[8]
- SUSS MicroTec PA 300 Control— Same function class: CMP, nullCompare in depthsource[9]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
- Gas1:100 DHF, 1:100 NH4OH[1]
- ConfigurationMX-7500 TBC brush load cell amp[1]
- ConfigurationPre-tech Finejet generator[1]
- ConfigurationSlurry flow controller interface / power box[1]
- Gas1:100 DHF[2]
- ConfigurationChemical Cabinets (3)[2]
- ConfigurationMX 7500 TBC brush load cell amp[2]
- Process Gases1:100 DHF, 1:100 NH4OH[1]
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the AS 2000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the AS 2000 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the AS 2000 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the AS 2000 are not on record.
Answerable by: an engineer who operated it or OEM installation records
The process node or technology generation of the AS 2000 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the AS 2000 are on record.
Answerable by: an OEM parts catalog or a service engineer
Sources & citations
Sources (10)Every fact above is drawn from these public sources
- [1]inventory listing
- [2]inventory listing
- [3]Equipment inventory listing
- [4]waferpedia.comwaferpedia.com
- [5]libertymachinery.comlibertymachinery.com
- [6]Equipment inventory listing
- [7]waferpedia.comwaferpedia.com
- [8]patents.google.compatents.google.com
- [9]waferpedia.comwaferpedia.com
- [10]AS-3000 of SCREEN(Japanese Version) — screen.co.jp (Mar 13, 2005)web.archive.org
Last updated Aug 26, 2026.
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The Lam / IPEC AvantGaard 776 is an 8-inch chemical mechanical polisher (CMP) available in dielectric and tungsten configurations.
The SUSS MicroTec PA 300 Control is a CMP tool with a 500 VA, 115V, 60Hz power spec and a 12-inch nickel plated aluminum chuck.
