Comparison ledger
KLA 1.112 PSL Wafer, Onto Innovation NSX 320, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | NSX 320Onto Innovation | |
|---|---|---|
| OEM | KLA | Onto Innovation |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1.112 PSL Wafer | Onto Innovation NSX |
| Cited variants | — | |
| Specifications | ||
| Configuration | NIST Traceable[2] | Single Phase[4] |
| Wafer Size | 8 inch[2] | — |
| NIST Traceable | True[2] | — |
| Compatible Tools | Surfscan 6xy0 and Sp1[3] | — |
| Full Load Current | — | 40 A[4] |
| Make | — | ONTO / Rudolph / August[4] |
| Model | — | NSX 320[4] |
| System type | — | Inspection System[4] |
| Electrical | — | Single phase, 200-240 V, 50/60 Hz[4] |
| Vintage | — | 2013[4] |
| Series | — | NSX Metrology Series[1] |
| Equipment type | — | Inspection System[4] |
| Power | — | Single Phase - 200-240 V - 50/60 Hz[4] |
| Capability | — | Macro defect detection (residue, adhesive, post-saw)[1] |
Plan your fab
Building a Metrology & Inspection process? Get a complete equipment list.
Open the fab equipment planner →