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NSX 320
What it is
How it works
The NSX 320 Metrology Series combines macro defect detection with two-dimensional critical dimension metrology and three-dimensional measurement capability.[3]
The NSX 320 Metrology Series handles warped and bonded wafers and supports localized and wafer-level metrology applications.[3]
Where it fits in the process flow
General reference — not yet source-verifiedMetrology and inspection tools in this class are used after deposition, patterning, bonding, or packaging steps to verify geometry, surface condition, and dimensional targets before the next process stage.
Applications
The NSX 320 supports advanced packaging applications including copper pillar bumping, TSV, and MEMS.[3]
What do the numbers mean?
Power & electrical5
Wafer handling1
Configuration & options9
Vintage & configurations
Documented models & variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| NSX 320 Wafer Level Packaging Metrology System | — | — | For transparent film thickness measurements. | f.machineryhost.com[3] |
| NSX 320 Advanced Wafer Level Packaging Metrology System | — | — | For height and transparent film thickness measurements. | f.machineryhost.com[3] |
| NSX 320 TSV Metrology System | — | — | For via depth and wafer thickness measurements. | f.machineryhost.com[3] |
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
What types of defects can an optical inspection system like the NSX 320 detect?General reference — not yet source-verified
Such systems can detect a wide range of defects including particles, scratches, voids, residues, pattern distortion, and embedded foreign material. Sensitivity depends on the illumination mode (brightfield, darkfield, or specialized) and the optical resolution of the tool.
What illumination modes are commonly available on such optical inspection tools?General reference — not yet source-verified
Common illumination modes include brightfield, darkfield, and phase contrast. Some systems also offer multiple wavelengths, polarization control, or confocal techniques to enhance detection of specific defect types, such as subsurface defects or pattern edge roughness.
How does an optical inspection system contribute to yield management?General reference — not yet source-verified
By providing rapid, high-sensitivity defect detection and classification, these tools enable immediate feedback to process engineers. Early identification of excursions or systematic defects allows corrective actions to be taken before many wafers are affected, thereby reducing scrap and improving overall yield.
Not publicly documented
The following facts about the NSX 320 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NSX 320 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the NSX 320 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NSX 320 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NSX 320 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the NSX 320 are on record.
Answerable by: an OEM parts catalog or a service engineer
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (3)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]Inventory photo
- [3]f.machineryhost.com — f.machineryhost.comf.machineryhost.com
Last updated Oct 11, 2026.
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