Waferpedia

Comparison ledger

Vanguard 2000versus12 Lapper

Buehler Vanguard 2000, Lapmaster 12 Lapper, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
12 LapperLapmaster
OEMBuehlerLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBuehler Vanguard 2000—
Specifications
Model Number63-2000[1]—
Serial Number587-VN2K-00104[1]—
Electrical220VAC, 50-60Hz, 12A[1]—
Platen Count6[2]—
Specimen CapacityUp to 6[2]—
FeaturesDispensing system, ultrasonic cleaner, specimen dryer[2]—
Programmability50 methods[2]—
Force ModesSingle-force or central-force[3]—
Voltage220VAC[3]—
Frequency50-60Hz[3]60 Hz[4]
Current12A[3]—
Outside plate diameter—12 inches[4]
Lapping Speed Range—0 to 60 rpm[5]
Wafer Size Compatibility—4 inches or smaller[4]
Input Voltage—110 V[4]
Phase—1[4]
Number of Rings—3[4]
Number of Weights—3[4]
Includes Slurry System—Yes[4]
Includes Timer—Yes[4]

Plan your fab

Building a CMP process? Get a complete equipment list.

Open the fab equipment planner →
Sources (5)Every fact above is drawn from these public sources
  1. [1]bidspotter.combidspotter.com
  2. [2]trimudajatimitra.comtrimudajatimitra.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]jmind.comjmind.com
  5. [5]etd.ohiolink.eduetd.ohiolink.edu