Waferpedia

Buehler

Vanguard 2000

CMPBuehler Vanguard 2000 family
Research Quality: 40% complete

Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

The Buehler Vanguard 2000 is a fully automated sample preparation system for grinding and polishing. The Vanguard 2000 features a 6-platen configuration that prepares up to six specimens at a time in single or central force.[1][2]

BuehlerVanguard 2000
No photo available yet

What it is

The Buehler Vanguard 2000 is a CMP tool in the Buehler product family.[3]

How it works

The Vanguard 2000 has a fully automatic, six-platen configuration.[2]

The Vanguard 2000 includes a dispensing system, an ultrasonic cleaner, and a specimen dryer.[2]

Where it fits in the process flow

The Vanguard 2000 prepares specimens in single-force or central-force modes and can process up to six specimens at a time.[2]

Applications

The Vanguard 2000 is used for grinding and polishing prepared specimens.[4][2]

What do the numbers mean?

Power & electrical2

Electrical
220VAC, 50-60Hz, 12A[1]
Accurate?
Voltage
220VAC[3]
Accurate?

Configuration & options9

Model Number
63-2000[1]2 sources
Accurate?
Serial Number
587-VN2K-00104[1]2 sources
Accurate?
Platen Count
6[2]2 sources
Accurate?
Specimen Capacity
Up to 6[2]2 sources
Accurate?
Features
Dispensing system, ultrasonic cleaner, specimen dryer[2]2 sources
Accurate?
Programmability
50 methods[2]2 sources
Accurate?
Force Modes
Single-force or central-force[3]
Accurate?
Frequency
50-60Hz[3]
Accurate?
Current
12A[3]
Accurate?
Interested in this tool?
Need help with this tool?Embed spec card

What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Electrical220VAC, 50-60Hz, 12A[1]
  • Voltage220VAC[3]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

Worked with this tool? Help preserve its knowledge →

Frequently asked questions

What is the typical throughput of a CMP system?General reference — not yet source-verified

Throughput varies significantly based on system design and process requirements, but CMP systems generally process multiple wafers per hour, with newer models offering higher automation and faster cycle times.

What consumables are required for CMP operation?General reference — not yet source-verified

Key consumables include polishing pads, which must be conditioned or replaced regularly, and chemical slurries, which are specific to the material being polished.

How does endpoint detection work on CMP systems?General reference — not yet source-verified

Many CMP systems use optical or motor-current-based endpoint detection to monitor removal rate and stop polishing at the desired thickness, preventing over-polishing or damage.

What maintenance is needed for a CMP system?General reference — not yet source-verified

Regular maintenance includes pad conditioning, cleaning of slurry delivery lines, calibration of pressure and rotation systems, and periodic replacement of consumable components like pad conditioner disks.

Can a CMP system handle different wafer sizes?General reference — not yet source-verified

Most CMP systems are designed for a specific wafer size, but some models can be configured or retrofitted to accommodate different diameters through adjustable hardware.

Not publicly documented

The following facts about the Vanguard 2000 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Vanguard 2000 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Vanguard 2000 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Vanguard 2000 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Vanguard 2000 are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Vanguard 2000 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

No research found yet — worked with this tool? Share what you know.

Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]bidspotter.com — bidspotter.combidspotter.com
  2. [2]trimudajatimitra.com — trimudajatimitra.comtrimudajatimitra.com
  3. [3]waferpedia.com — waferpedia.comwaferpedia.com
  4. [4]Equipment inventory listing
Was this page accurate?

Last updated Sep 30, 2026.

Compare with similar tools

View all →