Comparison ledger
Applied Materials 0020 23839 Part, Applied Materials Axcela, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0020 23839 PartApplied Materials | AxcelaApplied Materials |
|---|---|---|
| OEM | Applied Materials | Applied Materials |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0020 23839 Part | Applied Materials Axcela |
| Specifications | ||
| Configuration | Plate, Sensor Clamp, Hdpcvd Ultima +[1] | 7 System[2] |
| Tables | — | 5 x 300 mm (no backside)[2] |
| Wafer size capability | — | 150mm, 200mm, 300mm[3] |
| Film thickness uniformity | — | < 2%[3] |
| Maximum film thickness | — | 8 µm[3] |
| Maximum chambers | — | 4[3] |
| Process type | — | Physical Vapor Deposition (PVD)[4] |
| OEM | — | Applied Materials[2] |
| Model | — | Axcela[2] |
| Wafer sizes | — | 8, 12 inch[2] |
| Wafer diameter processing | — | 150/200/300mm[3] |
| Chambers | — | 4 chambers max[3] |
| Thickness uniformity | — | <2%[3] |
| Interfaces | — | SECS/GEM, GEM 300[2] |
Plan your fab
Building a Deposition process? Get a complete equipment list.
Open the fab equipment planner →