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CPX Pegasus alternatives
Comparable Etch equipment documented in the Waferpedia catalog.
6 comparable tools
Tegal
90 X
Etch
The Tegal 90 X is an etch system designed for semiconductor fabrication, representing a class of dry plasma etching equipment used to remove material from wafer surfaces with high precision.
Lam Research
Alliance A 6 Exelan HP Dielectric
Etch
Lam Alliance A 6 Exelan HP Dielectric is an etch tool with an 8-inch wafer size.
Nordson
March AP 1000
Etch
The Nordson March AP 1000 is a plasma system used for etching, operating at 50 Hz with a CB current of 25 A and an SCCR of 10 kA.
Nordson
March AP 300
Etch
The Nordson March AP 300 is a plasma system with a 300 Watt, 13.56 MHz RF generator and an integrated RF automated tuning network assembly.
Oxford Instruments
Plasmalab 100 ICP 380
Etch
The Oxford Plasmalab 100 ICP 380 is an etcher, as stated in the product listing.
Applied Materials
0010 47763
Etch
The Applied Materials 0010-47763 is an electrostatic chuck (ESC) assembly used in semiconductor etching processes.
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