Nikon
SF 130 alternatives
Comparable Lithography equipment documented in the Waferpedia catalog.
6 comparable tools
Canon
FPA 3000 i 5 ++ i-Line
Lithography
The Canon FPA 3000 i 5 ++ is an i-line stepper designed for 8-inch wafers.
Canon
FPA 5500 iZa i-Line
Lithography
The Canon FPA 5500 iZa is an i-line stepper lithography system for 8-inch wafers.
Canon
FPA 5510 iZ i-Line
Lithography
The Canon FPA 5510 iZ is an i-line stepper for 12-inch wafer processing.
Brooks
017-0024-01 Prealigner
Lithography
Brooks
017-0146-01 Prealigner
Lithography
Brooks 017-0146-01 is a prealigner manufactured by Brooks.
Ultratech
1000 Family
Lithography
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