Waferpedia

Comparison ledger

120 Continuousversus96 Continuous

Lapmaster 120 Continuous, Lapmaster 96 Continuous, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
96 ContinuousLapmaster
OEMLapmasterLapmaster
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLapmaster 120 ContinuousLapmaster 96 Continuous
Specifications
Phase—3 Phase[1]
Frequency—60 Hz[1]
Voltage—460v[1]
Configuration—80 amps[1]
Power supply—3 Phase, 60 Hz, 460 V, 80 amps[4]
Current—80 A[1]
OEM—Lapmaster[1]
Model—96[1]
Equipment type—Continuous Polisher[1]
Electrical—3 Phase, 60 Hz, 460 V, 80 amps[1]

Plan your fab

Building a CMP process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]Equipment inventory listing