Comparison ledger
KLA 2139 Brightfield, KLA .498 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | ||
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 2139 | KLA .498 PSL Wafer |
| Specifications | ||
| Voltage | 208 VAC[1] | — |
| Phase | 3 Phase[1] | — |
| Configuration | 30 A[1] | NIST Traceable[7] |
| Full load | 30A[2] | — |
| Power | 60[3] | — |
| Wafer inspector software | Rev. V5.4.010[4] | — |
| Full Load Current | 30 A[1] | — |
| Frequency | 50/60 Hz[1] | — |
| Vintage | 1996[1] | — |
| Wafer sizes | 6 inch, 8 inch[1] | — |
| Current (full load) | 30 A[1] | — |
| Software | WIN NT[5] | — |
| OEM | KLA[6] | — |
| Model | 2139[6] | — |
| Type | Brightfield Inspection[6] | — |
| Wafer Sizes | 6, 8 inch[1] | — |
| Electrical | 208 VAC, 3 Phase, 30 A, 50/60 Hz[1] | — |
| NIST traceability | — | Yes[7] |
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